JPH0243655Y2 - - Google Patents

Info

Publication number
JPH0243655Y2
JPH0243655Y2 JP1985102530U JP10253085U JPH0243655Y2 JP H0243655 Y2 JPH0243655 Y2 JP H0243655Y2 JP 1985102530 U JP1985102530 U JP 1985102530U JP 10253085 U JP10253085 U JP 10253085U JP H0243655 Y2 JPH0243655 Y2 JP H0243655Y2
Authority
JP
Japan
Prior art keywords
locking
locking members
surface plate
driver
grooves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985102530U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6211558U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985102530U priority Critical patent/JPH0243655Y2/ja
Priority to US06/876,690 priority patent/US4707945A/en
Publication of JPS6211558U publication Critical patent/JPS6211558U/ja
Application granted granted Critical
Publication of JPH0243655Y2 publication Critical patent/JPH0243655Y2/ja
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP1985102530U 1985-07-05 1985-07-05 Expired JPH0243655Y2 (en])

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1985102530U JPH0243655Y2 (en]) 1985-07-05 1985-07-05
US06/876,690 US4707945A (en) 1985-07-05 1986-06-20 Upper plate driving system for surface lapping machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985102530U JPH0243655Y2 (en]) 1985-07-05 1985-07-05

Publications (2)

Publication Number Publication Date
JPS6211558U JPS6211558U (en]) 1987-01-24
JPH0243655Y2 true JPH0243655Y2 (en]) 1990-11-20

Family

ID=14329859

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985102530U Expired JPH0243655Y2 (en]) 1985-07-05 1985-07-05

Country Status (2)

Country Link
US (1) US4707945A (en])
JP (1) JPH0243655Y2 (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH064506U (ja) * 1992-06-24 1994-01-21 象印マホービン株式会社 電熱調理器具の安全装置
US5665656A (en) * 1995-05-17 1997-09-09 National Semiconductor Corporation Method and apparatus for polishing a semiconductor substrate wafer
US5957763A (en) * 1997-09-19 1999-09-28 Speedfam Corporation Polishing apparatus with support columns supporting multiple platform members
US5997390A (en) * 1998-02-02 1999-12-07 Speedfam Corporation Polishing apparatus with improved alignment of polishing plates

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3290918A (en) * 1963-12-06 1966-12-13 Anthony V Weasler Method of manufacturing a shaft coupling
US4157637A (en) * 1977-08-30 1979-06-12 Moskovskoe Vysshee Tekhnicheskoe Uchilische Imeni N.E. Baumana Planetary-type lapping machine for lapping a group of workpieces
US4392759A (en) * 1981-02-09 1983-07-12 General Electric Company Quick disconnect mechanism for shafts
JPS57168109A (en) * 1981-04-10 1982-10-16 Shinetsu Eng Kk Device for measuring thickness of work piece in lapping plate

Also Published As

Publication number Publication date
US4707945A (en) 1987-11-24
JPS6211558U (en]) 1987-01-24

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